We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.
To learn more please refer to our paper: A MEMS Implementation of a Classic Parametric Resonator. S. Shmulevich,I. (Hotzen) Grinberg and D. Elata, IEEE-JMEMS, 24(5), 1285-1292, 2015.
This paper has two important Appendices that are included in a supplementary material folder, which unfortunately is obscured in the IEEE Explore system.